A comprehensive Monte Carlo calculation of dopant contrast in secondary-electron imagingMaurizio Dapor1, B. J. Inkson1, C. Rodenburg1 and J. M. Rodenburg2
1 Department of Engineering Materials, University of Sheffield - Mappin Street, Sheffield S1 3JD, UK, EU
2 Department of Electronic and Electrical Engineering, University of Sheffield - Mappin Street, Sheffield S1 3JD, UK, EU
received 25 March 2008; accepted in final form 29 March 2008; published May 2008
published online 7 May 2008
99.10.Cd - Errata.
© EPLA 2008