On the simultaneous extraction of positive ions and electrons from single-grid ICP sourceS. V. Dudin and D. V. Rafalskyi
Department of Physics and Technology, V.N. Karazin Kharkiv National University - 31 Kurchatova ave., 61108 Kharkiv, Ukraine
received 8 September 2009; accepted in final form 17 November 2009; published December 2009
published online 16 December 2009
The results of investigations on the simultaneous extraction of positive ions and electrons from a single-grid ICP source are reported. It is shown that the single-grid ion source is capable of generating coincident ion and electron flows in contrast to the more common two- or three-grid sources. Electron and ion emission characteristics of the source are presented for the cases of DC and RF acceleration bias. A method of ion/electron current ratio control is proposed allowing to change the current compensation state of the ion beam from non-compensated to highly over-compensated. The researches were conducted in the ion energy range 10–250 eV with a high ion current density of 5 mA/cm2, so the presented results may be useful for modern technology applications.
52.59.Bi - Grid- and ion-diode-accelerated beams.
© EPLA 2009