A new grid-type electron filter for volume-production negative-ion source

¹ Scientific Center of Physical Technologies - Svobody sq. 6, 61108, Kharkiv, Ukraine
² Department of Physics and Technology, V. N. Karazin Kharkiv National University - Kurchatova ave. 31, 61108, Kharkiv, Ukraine

^a dmytro_rafalskyi@mail.ru

Received: 14 November 2011
Accepted: 24 January 2012

Abstract

A new system providing continuous generation of broad negative-ion beam is described and characterized. The key element of the system is the grid-type electron filter allowing the formation without magnetic field of a stationary highly electronegative plasma which can be biased negatively with respect to a relatively high-area electrode that allows to extract the negative ions. Measurements of negative-ion energy distribution functions conducted using a magnetically filtered energy analyzer show broad (250 mm) negative-ion beam formation with controllable energy starting from several eV. A conclusion is made about the possibility of practical application of the grid-type electron filter in negative ion sources for electric propulsion and etching technologies.