Structural and mechanical properties of ta-C films grown by pulsed laser deposition

M. Bonelli; A. P. Fioravanti; A. Miotello; P. M. Ossi

doi:10.1209/epl/i2000-00297-5

All issues

Volume 50 / No 4 (May II 2000)

Europhys. Lett., 50 4 (2000) 501-506

Abstract

Issue		Europhys. Lett. Volume 50, Number 4, May II 2000


Page(s)		501 - 506
Section		Condensed matter: structure, mechanical and thermal properties
DOI		https://doi.org/10.1209/epl/i2000-00297-5
Published online		01 September 2002

Europhys. Lett., 50 (4), pp. 501-506 (2000)

Structural and mechanical properties of ta-C films grown by pulsed laser deposition

M. Bonelli¹, A. P. Fioravanti², A. Miotello¹ and P. M. Ossi³

¹ Istituto Nazionale per la Fisica della Materia (INFM) and Dipartimento di Fisica Università di Trento - I-38050 Povo (TN ), Italy
² Dipartimento di Ingegneria Nucleare, Politecnico di Milano - I-20133 Milano, Italy
³ Istituto Nazionale per la Fisica della Materia (INFM ) and Dipartimento di Ingegneria Nucleare, Politecnico di Milano - I-20133 Milano, Italy

Corresponding author: paolo.ossi@polimi.it

Received: 8 November 1999
Accepted: 6 March 2000

Abstract

Diamond-like carbon (DLC) films have been prepared by pulsed laser deposition (PLD) (wavelength 248 nm), ablating highly oriented pyrolytic graphite (HOPG) at room temperature in a vacuum of $10^{-2}\un{Pa}$ , at fluences between 0.5 and $35\un{J\,cm^{-2}}$ . Films have been deposited on Si(100) with and without a ceramic interlayer, namely SiC, TiC, or TiN. Structural analysis with Raman and infrared spectroscopy shows that the films are hydrogen free and undergo a transition from mainly disordered graphitic to up to 84% tetrahedral amorphous carbon (ta-C) above a laser threshold fluence of $5\un{J\,cm}^{-2}$ , corresponding to $2.5\times 10^8\un{W\,cm}^{-2}$ . Nanoindentation indicates that film hardness is as high as 70 GPa. The measured residual stresses do not exceed 2 GPa. Scratch tests show excellent adhesion properties of films deposited on SiC. Friction coefficients as low as 0.05 have been measured.

PACS: 61.80.Ba – Ultraviolet, visible, and infrared radiation effects (including laser radiation) / 64.70.Kb – Solid-solid transitions / 81.15.Fg – Laser deposition

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