Volume 50, Number 4, May II 2000
|Page(s)||501 - 506|
|Section||Condensed matter: structure, mechanical and thermal properties|
|Published online||01 September 2002|
Structural and mechanical properties of ta-C films grown by pulsed laser deposition
Istituto Nazionale per la Fisica della Materia (INFM) and
Dipartimento di Fisica Università di Trento - I-38050 Povo (TN ), Italy
2 Dipartimento di Ingegneria Nucleare, Politecnico di Milano - I-20133 Milano, Italy
3 Istituto Nazionale per la Fisica della Materia (INFM ) and Dipartimento di Ingegneria Nucleare, Politecnico di Milano - I-20133 Milano, Italy
Corresponding author: firstname.lastname@example.org
Accepted: 6 March 2000
Diamond-like carbon (DLC) films have been prepared by pulsed laser deposition (PLD) (wavelength 248 nm), ablating highly oriented pyrolytic graphite (HOPG) at room temperature in a vacuum of , at fluences between 0.5 and . Films have been deposited on Si(100) with and without a ceramic interlayer, namely SiC, TiC, or TiN. Structural analysis with Raman and infrared spectroscopy shows that the films are hydrogen free and undergo a transition from mainly disordered graphitic to up to 84% tetrahedral amorphous carbon (ta-C) above a laser threshold fluence of , corresponding to . Nanoindentation indicates that film hardness is as high as 70 GPa. The measured residual stresses do not exceed 2 GPa. Scratch tests show excellent adhesion properties of films deposited on SiC. Friction coefficients as low as 0.05 have been measured.
PACS: 61.80.Ba – Ultraviolet, visible, and infrared radiation effects (including laser radiation) / 64.70.Kb – Solid-solid transitions / 81.15.Fg – Laser deposition
© EDP Sciences, 2000
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