| Issue |
Europhys. Lett.
Volume 52, Number 2, October II 2000
|
|
|---|---|---|
| Page(s) | 185 - 188 | |
| Section | Condensed matter: structure, mechanical and thermal properties | |
| DOI | https://doi.org/10.1209/epl/i2000-00421-1 | |
| Published online | 01 September 2002 | |
AFM study of surface roughening in sputter-deposited nickel films on ITO glasses
Department of Mechanical Systems Engineering, University of the Ryukyus
1 Senbaru, Nishihara-cho Okinawa 903-0213 Japan
Received:
25
October
1999
Accepted:
31
August
2000
We have studied the kinetic surface roughening of nickel films sputter-deposited on ITO glasses within a temperature range from 423 K to 573 K. The scaling exponents were determined by the surface measurements of AFM and compared with theoretical values in the surface diffusion-driven growth model.
PACS: 68.55.-a – Thin film structure and morphology / 81.15.Cd – Deposition by sputtering / 68.35.Ct – Interface structure and roughness
© EDP Sciences, 2000
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