Volume 52, Number 2, October II 2000
|Page(s)||185 - 188|
|Section||Condensed matter: structure, mechanical and thermal properties|
|Published online||01 September 2002|
AFM study of surface roughening in sputter-deposited nickel films on ITO glasses
Department of Mechanical Systems Engineering, University of the Ryukyus
1 Senbaru, Nishihara-cho Okinawa 903-0213 Japan
Accepted: 31 August 2000
We have studied the kinetic surface roughening of nickel films sputter-deposited on ITO glasses within a temperature range from 423 K to 573 K. The scaling exponents were determined by the surface measurements of AFM and compared with theoretical values in the surface diffusion-driven growth model.
PACS: 68.55.-a – Thin film structure and morphology / 81.15.Cd – Deposition by sputtering / 68.35.Ct – Interface structure and roughness
© EDP Sciences, 2000
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.