Volume 60, Number 5, December 2002
|Page(s)||782 - 787|
|Section||Condensed matter: electronic structure, electrical, magnetic, and optical properties|
|Published online||01 November 2002|
Substrate-suppressed phase transition in nano-crystalline thin films
Department of Materials and Interfaces, Weizmann
Institute of Science Rehovot, 76100, Israel
2 Department of Materials and Nuclear Engineering, University of Maryland College Park, MD, 20742, USA
Accepted: 16 September 2002
Upon substrate removal nano-crystalline cubic thin films transformed into the tetragonal phase. Randomly oriented nano-crystalline films were prepared with moderate residual tensile stress by sol-gel processing or RF sputtering. The low dielectric constant and the X-ray diffraction spectra identified the films as being cubic at room temperature. Despite the tensile stress in the substrate-supported films, the free-standing films became corrugated, indicating 0.3–0.5% lateral expansion. The fact that the cubic-to-tetragonal phase transition was responsible for the lateral expansion has been confirmed by a fivefold increase of the dielectric constant and a detectable piezoelectric effect.
PACS: 77.55.+f – Dielectric thin films / 77.22.Ch – Permittivity (dielectric function) / 77.80.Dj – Domain structure; hysteresis
© EDP Sciences, 2002
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.