| Issue |
Europhys. Lett.
Volume 71, Number 3, August 2005
|
|
|---|---|---|
| Page(s) | 407 - 411 | |
| Section | Physics of gases, plasmas and electric discharges | |
| DOI | https://doi.org/10.1209/epl/i2005-10108-1 | |
| Published online | 14 July 2005 | |
Extinction of RF capacitive low-pressure discharges
1
Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique Palaiseau 91128, France
2
Department of Physics and Technology, Kharkov National University Kharkov 61077, Ukraine
3
Unaxis Displays Division France SAS - 5 rue Leon Blum Palaiseau 91120, France
Corresponding author: lisovskiy@yahoo.com
Received:
23
May
2005
Accepted:
10
June
2005
Breakdown and extinction curves have been measured for RF
capacitive low-pressure discharges in nitrogen and hydrogen at a
frequency of 13.56
and discharge gaps between 6 and
25
. In particular, the low-pressure, high-voltage region
of the extinction curves is reported for the first time. The
shape of the extinction curves was found to be similar to that of
the breakdown curves. At sufficiently large gaps (
)
the RF extinction voltage was found to be multi-valued in the
low-pressure region, as is observed for the breakdown voltage. In
this region, extinction can occur when the voltage is increased
because the width of the two sheaths occupies the whole discharge
space.
PACS: 52.80.Pi – High-frequency and RF discharges
© EDP Sciences, 2005
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