Issue |
EPL
Volume 82, Number 1, April 2008
|
|
---|---|---|
Article Number | 15001 | |
Number of page(s) | 5 | |
Section | Physics of Gases, Plasmas and Electric Discharges | |
DOI | https://doi.org/10.1209/0295-5075/82/15001 | |
Published online | 17 March 2008 |
Similarity law for rf breakdown
1
Department of Physics and Technology, Kharkov National University - Kharkov 61077, Ukraine
2
Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique - Palaiseau 91128, France, EU
3
Unaxis Displays Division France SAS - 5, Rue Leon Blum, Palaiseau 91120, France, EU
4
Association Euratom-CEA, Département de Recherches sur la Fusion Contrôlée, CEA - Cadarache, F-13108 Saint Paul lez Durance Cedex, France, EU
5
Riber - 31 rue Casimir Périer, 95873 Bezons, France, EU
6
Department of Physics, Kharkov National University - Kharkov 61077, Ukraine
Corresponding author: lisovskiy@yahoo.com
Received:
4
January
2008
Accepted:
15
February
2008
This paper demonstrates that the similarity law for the rf gas breakdown has
the form (where
Urf is the rf breakdown voltage, p is the gas pressure, L and R are the
length and diameter of the discharge tube, respectively, f is the frequency
of the rf electric field). It means that two rf breakdown curves registered
for narrow inter-electrode gaps or in geometrically similar tubes and depicted in the
graph will coincide only when the
condition
is met. This similarity law follows
from the rf gas breakdown equation and it is well supported by the results
of measurements.
PACS: 52.80.Pi – High-frequency and RF discharges
© EPLA, 2008
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.