Volume 82, Number 1, April 2008
|Number of page(s)||5|
|Section||Physics of Gases, Plasmas and Electric Discharges|
|Published online||17 March 2008|
Similarity law for rf breakdown
Department of Physics and Technology, Kharkov National University - Kharkov 61077, Ukraine
2 Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique - Palaiseau 91128, France, EU
3 Unaxis Displays Division France SAS - 5, Rue Leon Blum, Palaiseau 91120, France, EU
4 Association Euratom-CEA, Département de Recherches sur la Fusion Contrôlée, CEA - Cadarache, F-13108 Saint Paul lez Durance Cedex, France, EU
5 Riber - 31 rue Casimir Périer, 95873 Bezons, France, EU
6 Department of Physics, Kharkov National University - Kharkov 61077, Ukraine
Corresponding author: email@example.com
Accepted: 15 February 2008
This paper demonstrates that the similarity law for the rf gas breakdown has the form (where Urf is the rf breakdown voltage, p is the gas pressure, L and R are the length and diameter of the discharge tube, respectively, f is the frequency of the rf electric field). It means that two rf breakdown curves registered for narrow inter-electrode gaps or in geometrically similar tubes and depicted in the graph will coincide only when the condition is met. This similarity law follows from the rf gas breakdown equation and it is well supported by the results of measurements.
PACS: 52.80.Pi – High-frequency and RF discharges
© EPLA, 2008
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