Volume 88, Number 5, December 2009
|Number of page(s)||4|
|Section||Physics of Gases, Plasmas and Electric Discharges|
|Published online||16 December 2009|
On the simultaneous extraction of positive ions and electrons from single-grid ICP source
Department of Physics and Technology, V.N. Karazin Kharkiv National University - 31 Kurchatova ave., 61108 Kharkiv, Ukraine
Corresponding author: email@example.com
Accepted: 17 November 2009
The results of investigations on the simultaneous extraction of positive ions and electrons from a single-grid ICP source are reported. It is shown that the single-grid ion source is capable of generating coincident ion and electron flows in contrast to the more common two- or three-grid sources. Electron and ion emission characteristics of the source are presented for the cases of DC and RF acceleration bias. A method of ion/electron current ratio control is proposed allowing to change the current compensation state of the ion beam from non-compensated to highly over-compensated. The researches were conducted in the ion energy range 10–250 eV with a high ion current density of 5 mA/cm2, so the presented results may be useful for modern technology applications.
PACS: 52.59.Bi – Grid- and ion-diode-accelerated beams
© EPLA, 2009
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