Bimodal range distributions of low-energy carbon ions in tetrahedral amorphous carbon

¹  Technische Universität München, Physik Department E12 - D-85748 Garching, Germany, EU
²  Universität der Bundeswehr München, Angewandte Physik und Messtechnik, LRT 2 - D-85577 Neubiberg, Germany, EU
³  Centre for Interdisciplinary Plasma Science, Max-Planck-Institut für Plasmaphysik, EURATOM Association Boltzmannstr. 2, D-85748 Garching, Germany, EU
⁴  Universität Göttingen, II. Physikalisches Institut - Tammannstrasse 1-37077 Göttingen, Germany, EU
⁵  Forschungszentrum Rossendorf e. V., Institut für Ionenstrahlphysik und Materialforschung - Postfach 510119, D-01314 Dresden, Germany, EU

Corresponding author: guenther.dollinger@unibw.de

Received: 8 December 2009
Accepted: 4 May 2010

Abstract

Range and mixing distributions of carbon ions deposited onto tetrahedral amorphous carbon films at kinetic energies between 22 eV and 692 eV are measured utilizing high-resolution elastic recoil detection. These data are compared to respective calculations based on binary collision approximation as well as to classical molecular-dynamics simulations. The measured range profiles reveal asymmetric, bimodal structures which are not reproduced from theories. The measured mixing distributions approve the measured range distributions, in particular the observed differences between theory and experiment, which have to be considered in subplantation growth models.