Volume 97, Number 1, February 2012
|Number of page(s)||5|
|Section||Atomic, Molecular and Optical Physics|
|Published online||03 January 2012|
Pit formation on poly(methyl methacrylate) due to ablation induced by individual slow highly charged ion impact
Institute of Applied Physics, TU Wien - 1040 Vienna, Austria, EU
2 Institute of Ion Beam Physics & Materials Research, Helmholtz-Zentrum Dresden-Rossendorf 01328 Dresden, Germany, EU
3 Max-Planck-Institut für Kernphysik - 69029 Heidelberg, Germany, EU
4 Faculty of Physics, Catholic University of Rio Grande do Sul - 90619-900 Porto Alegre, Brazil
5 IMS Nanofabrication AG - 1020 Vienna, Austria, EU
Accepted: 17 November 2011
We report the formation of nano-sized pits on poly(methyl methacrylate) after exposure to slow highly charged ion beams. The pits are formed on the polymer surface as a direct result of individual ion impacts. Intermittent contact mode atomic-force microscopy was employed to study the size evolution of the pits in dependence of potential and kinetic energies of the incident ions. A potential energy threshold value of approximately 7 keV was found for pit formation. Above this value an increase in potential energy results in an increasing pit volume, while the pit shape can be tuned by varying the kinetic energy.
PACS: 34.35.+a – Interactions of atoms and molecules with surfaces / 79.20.-m – Impact phenomena (including electron spectra and sputtering) / 68.49.Sf – Ion scattering from surfaces (charge transfer, sputtering, SIMS)
© EPLA, 2012
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