On the anisotropy and thermalization of the metal sputtered atoms in a low-pressure magnetron dischargeL. de Poucques1, C. Vitelaru1, 2, T. M. Minea1, J. Bretagne1 and G. Popa2
1 LPGP, UMR 8578: CNRS-Paris-Sud XI University - Bat. 210, 91405 Orsay Cedex, France, EU
2 Faculty of Physics, Al. I. Cuza University - 11 Carol I Blvd., 700506 Iasi, Romania, EU
received 23 December 2007; accepted in final form 12 February 2008; published April 2008
published online 20 March 2008
Space-resolved velocity distributions of titanium atoms sputtered in a direct-current (dc) magnetron discharge working at low pressure (0.4 Pa) were investigated using the laser-diode-induced fluorescence technique. A blue-light laser diode, covering the Ti 3d24s2- 3d2(3F)4s4p(1P0) transition =398.289 nm, was used to excite neutral Ti atoms and to measure their Doppler absorption profile through the induced fluorescence signal. Taking advantage of the very narrow laser linewidth, energetic and thermalized atoms can be clearly distinguished. Moreover, flux distributions of sputtered atoms along the laser direction were deduced and discussed.
52.70.Kz - Optical (ultraviolet, visible, infrared) measurements.
52.70.Nc - Particle measurements.
52.25.Fi - Transport properties.
© EPLA 2008