Volume 133, Number 4, February 2021
|Number of page(s)||7|
|Section||Atomic, Molecular and Optical Physics|
|Published online||29 March 2021|
Characterization of plasma chemistry for an optimized pulse resonance atmospheric-pressure plasma system
1 School of Physics and Clinical & Optometric Sciences, Technology University of Dublin Kevin Street, Dublin 8, Ireland
2 Faculty of Physics, University of Belgrade - P.O.B. 368, Belgrade, Serbia
Received: 13 September 2020
Accepted: 25 January 2021
The paper deals with monitoring the plasma chemistry of an atmospheric plasma low-frequency AC power supply. The study is based on optical spectroscopy and electrical measurements as diagnostic methods. The work includes details of developing and operating an in-house made, non-thermal, dielectric-free atmospheric plasma system, built for biological and agriculture applications. The experimental results clearly show the cross-dependence of the measured outputs (O3, O2, N2) and a wide range of process parameters (duty cycle, discharge frequency, voltage, etc.). A design-of-experiment approach is taken for phase-resolved optical emission spectroscopy of oxygen and nitrogen spectral lines/bands. The new plasma system allows an increase in the plasma-surface interaction selectivity and reduces plasma-induced damages to the surface.
PACS: 32.70.-n – Intensities and shapes of atomic spectral lines / 52.70.-m – Plasma diagnostic techniques and instrumentation / 81.65.Cf – Surface cleaning, etching, patterning
© 2021 EPLA
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.